Fig. 1


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Schematic diagram of (a) 3D view, (b) top view, and (c) bottom view of the proposed AFSS unit cell. The relevant geometrical dimensions are p = 60, l1 = 55, l2 = 22, l3 = 16, l4 = 24, l5 = 11, w1 = 2, w2 = 2, w3 = 5, a = 12, all in μm. The thicknesses of the p-type doped silicon, silicon dioxide substrates are h1 = 3 μm, h2 = 0.3 μm, respectively.

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