Open Access
Table 1
Comparison of the micro- and nano- fabrication methods.
| Method | Time consuming | Precision | Price | Area | Unit shape | References |
|---|---|---|---|---|---|---|
| EBL | Yes | High | High | Limited | Free | [81] |
| Mask deposition | No | Moderate | Moderate | Large | Free | [85] |
| DLW | No | Low | Moderate | Limited | Limited | [84] |
| nanoimprint | No | High | Low | Large | Free | [87] |
| FIB | No | High | High | Limited | Free | [79] |
| Chemistry method | Yes | Low | Low | Large | Limited | – |
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