Table 1

Comparison of the micro- and nano- fabrication methods.

Method Time consuming Precision Price Area Unit shape References
EBL Yes High High Limited Free [81]
Mask deposition No Moderate Moderate Large Free [85]
DLW No Low Moderate Limited Limited [84]
nanoimprint No High Low Large Free [87]
FIB No High High Limited Free [79]
Chemistry method Yes Low Low Large Limited

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