Open Access
Table 1
Deposition parameters for the designed multilayer metamaterial.
| Layer | Target | Sputtering pressure (Pa) | Power (W) | Deposition time (Sec) | Assumed thickness (nm) | Deposition temperature (°C) |
|---|---|---|---|---|---|---|
| ITO | ITO | 2.9 × 10−2 | 60 | 225 | 14 | 650 |
| Ag | Ag | 1.9 × 10−2 | 50 | 33 | 6 | 20 |
| SiO2 | SiO2 | 2.2 × 10−2 | 120 | 822 | 46.7 | 20 |
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